CONDUCTIVITY CHANGES IN TUNGSTEN SILICIDE FILMS DUE TO RAPID THERMAL-PROCESSING

被引：2

|

作者：

JAYADEV, TS

JOSHI, A

机构：

来源：

ELECTRONICS LETTERS | 1984年 / 20卷 / 14期

关键词：

D O I：

10.1049/el:19840417

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：604 / 606

页数：3

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