CONDUCTIVITY CHANGES IN TUNGSTEN SILICIDE FILMS DUE TO RAPID THERMAL-PROCESSING

被引：2
|
作者：
JAYADEV, TS
JOSHI, A
机构：
来源：
ELECTRONICS LETTERS | 1984年 / 20卷 / 14期
关键词：
D O I：
10.1049/el:19840417
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：604 / 606
页数：3
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