KINETICS OF TITANIUM SILICIDE FORMATION BY RAPID THERMAL-PROCESSING

被引：4
|
作者：
PAMLER, W
WANGEMANN, K
BENSCH, W
BUSSMANN, E
MITWALSKY, A
机构：
来源：
FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE | 1989年 / 333卷 / 4-5期
关键词：
D O I：
10.1007/BF00572378
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：569 / 575
页数：7
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