AES AND SIMS ANALYSES OF A LOW-RESISTANCE OHMIC CONTACT LAYER OF GAP

被引：6
|
作者：
ZHANG, FJ
SANG, BS
LI, BJ
机构：
[1] Department of Physics, Lanzhou University, Lanzhou
来源：
APPLIED SURFACE SCIENCE | 1994年 / 78卷 / 01期
关键词：
D O I：
10.1016/0169-4332(94)90033-7
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
On the basis of a study of the metallurgical properties and the interface characteristics of the ohmic contact layer formed by p-GaP with Pd/Zn/Pd metal films [F. Zhang, Z. Song and J. Peng, Appl. Surf. Sci. 62 (1992) 83], we further analyze the profile distribution and atomic binding state of the elements in the contact layer by AES and SIMS.
引用
收藏
页码：71 / 75
页数：5
相关论文
共 50 条
  • [1] A LOW-RESISTANCE OHMIC CONTACT FOR SILICON SEMICONDUCTOR DEVICES
    MATLOW, SL
    RALPH, EL
    SOLID-STATE ELECTRONICS, 1961, 2 (04) : 202 - 208
  • [2] LOW-RESISTANCE OHMIC CONTACT ON N-CDTE
    BRUN, D
    DAUDIN, B
    LIGEON, E
    APPLIED PHYSICS LETTERS, 1994, 65 (04) : 475 - 477
  • [3] Low-resistance ohmic contact to n-GaAs
    Vald-Perlov, VM
    Veitz, VV
    12TH INTERNATIONAL CONFERENCE - MICROWAVE & TELECOMMUNICATION TECHNOLOGY, CONFERENCE PROCEEDINGS, 2002, : 161 - 162
  • [4] Low-resistance Ti/Al ohmic contact on undoped ZnO
    Kim, SY
    Jang, HW
    Kim, JK
    Jeon, CM
    Park, WI
    Yi, GC
    Lee, JL
    JOURNAL OF ELECTRONIC MATERIALS, 2002, 31 (08) : 868 - 871
  • [5] Low-resistance Ti/Al ohmic contact on undoped ZnO
    Kim S.Y.
    Jang H.W.
    Kim J.K.
    Jeon C.M.
    Park W.I.
    Yi G.-C.
    Lee J.-L.
    Journal of Electronic Materials, 2002, 31 (8) : 868 - 871
  • [6] Low-resistance nonalloyed ohmic contact to p-type GaN using strained InGaN contact layer
    Kumakura, K
    Makimoto, T
    Kobayashi, N
    APPLIED PHYSICS LETTERS, 2001, 79 (16) : 2588 - 2590
  • [7] LOW-RESISTANCE OHMIC CONTACTS ON WIDE BAND-GAP GAN
    LIN, ME
    MA, Z
    HUANG, FY
    FAN, ZF
    ALLEN, LH
    MORKOC, H
    APPLIED PHYSICS LETTERS, 1994, 64 (08) : 1003 - 1005
  • [8] Low-resistance Ohmic contact for GaN-based laser diodes
    Wang, Junfei
    Hu, Junhui
    Guan, Chaowen
    Fang, Songke
    Wang, Zhichong
    Wang, Guobin
    Xu, Ke
    Lv, Tengbo
    Wang, Xiaoli
    Shi, Jianyang
    Li, Ziwei
    Zhang, Junwen
    Chi, Nan
    Shen, Chao
    JOURNAL OF SEMICONDUCTORS, 2024, 45 (12)
  • [9] Low-resistance Ohmic contact for GaN-based laser diodes
    Junfei Wang
    Junhui Hu
    Chaowen Guan
    Songke Fang
    Zhichong Wang
    Guobin Wang
    Ke Xu
    Tengbo Lv
    Xiaoli Wang
    Jianyang Shi
    Ziwei Li
    Junwen Zhang
    Nan Chi
    Chao Shen
    Journal of Semiconductors, 2024, 45 (12) : 148 - 154
  • [10] A low-resistance, thermally stable Ohmic contact to n-GaSb
    Robinson, J.A.
    Mohney, S.E.
    Journal of Applied Physics, 2005, 98 (03):
12345