ELECTROCHEMICAL ETCH-STOP CONTROL FOR SILICON STRUCTURES CONTAINING ELECTRONIC COMPONENTS

被引：4
|
作者：
GEALER, RL
HAMMERLE, RH
KARSTEN, H
WROBLOWA, HS
机构：
来源：
JOURNAL OF APPLIED ELECTROCHEMISTRY | 1988年 / 18卷 / 03期
关键词：
D O I：
10.1007/BF01093764
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：463 / 468
页数：6
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