STUDY ON FERROELECTRIC PLZT THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING

被引：1
|
作者：
LU, DX
LI, ZY
HUANG, LB
LIN, GQ
机构：
来源：
CHINESE SCIENCE BULLETIN | 1994年 / 39卷 / 18期
关键词：
RF MAGNETRON SPUTTERING; FERROELECTRIC THIN FILM; MICROSTRUCTURE; ELECTRICAL PROPERTIES;
D O I：
暂无
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
收藏
页码：1507 / 1510
页数：4
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