THE INFLUENCE OF ATOMIC MIXING ON SIMS DEPTH PROFILING OF THIN BURIED LAYERS

被引：5
|
作者：
KING, BV
TSONG, IST
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 218卷 / 1-3期
关键词：
D O I：
10.1016/0167-5087(83)91066-9
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：687 / 690
页数：4
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