MIXING AND CHEMICAL EFFECTS IN SIMS DEPTH PROFILING THE SI/SIO2 INTERFACE

被引：8

作者：

ANDERLE, M ^{[1
]}

LOXTON, CM ^{[1
]}

机构：

[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 15卷 / 1-6期

关键词：

D O I：

10.1016/0168-583X(86)90281-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：186 / 188

页数：3

共 50 条

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