SIMS DEPTH PROFILING FOR THE CHARACTERIZATION OF SI-SIO2 STRUCTURES

被引：9
|
作者：
BARSONY, I [1 ]
GIBER, J [1 ]
机构：
[1] TECH UNIV BUDAPEST,INST PHYS,H-1502 BUDAPEST,HUNGARY
来源：
APPLIED SURFACE SCIENCE | 1980年 / 4卷 / 01期
关键词：
D O I：
10.1016/0378-5963(80)90002-1
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：1 / 10
页数：10
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