STRUCTURAL UNIFORMITY OF MULTILAYERED TUNGSTEN-CARBON BRAGG REFLECTORS PREPARED BY RF MAGNETRON SPUTTERING

被引：3
|
作者：
TAKENAKA, H [1 ]
TAKAOKA, H [1 ]
ISHII, Y [1 ]
HASHIZUME, H [1 ]
机构：
[1] TOKYO INST TECHNOL, ENGN MAT RES LAB, MIDORI KU, YOKOHAMA, KANAGAWA 227, JAPAN
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 07期
关键词：
D O I：
10.1063/1.1140865
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：2021 / 2023
页数：3
相关论文
共 50 条
  • [31] Structural properties of Eu-doped GaN films prepared by RF magnetron sputtering
    Yudate, S.
    Fujii, T.
    Shirakata, S.
    THIN SOLID FILMS, 2008, 517 (04) : 1453 - 1456
  • [32] Properties of ITO films prepared by rf magnetron sputtering
    El Akkad, F.
    Punnoose, A.
    Prabu, G.
    Applied Physics A: Materials Science and Processing, 2000, 71 (02): : 157 - 160
  • [33] Morphological and structural characterization of reduced graphene oxide films prepared by RF magnetron sputtering
    Rudin, Nor Shahira Md
    Yassin, Muhammad Abdullah Izat Mohd
    Omar, Muhammad Firdaus
    FULLERENES NANOTUBES AND CARBON NANOSTRUCTURES, 2025,
  • [34] Properties of ITO films prepared by rf magnetron sputtering
    F. El Akkad
    A. Punnoose
    G. Prabu
    Applied Physics A, 2000, 71 (2) : 157 - 160
  • [35] Properties of ITO films prepared by rf magnetron sputtering
    El Akkad, F
    Punnoose, A
    Prabu, G
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2000, 71 (02): : 157 - 160
  • [36] Deposition and characterisation of carbon-containing tungsten coatings prepared by reactive magnetron sputtering
    Rebholz, C
    Schneider, JM
    Ziegele, H
    Rahle, B
    Leyland, A
    Matthews, A
    VACUUM, 1998, 49 (04) : 265 - 272
  • [37] Wear behaviour of carbon-containing tungsten coatings prepared by reactive magnetron sputtering
    Rebholz, C
    Schneider, JM
    Leyland, A
    Matthews, A
    SURFACE & COATINGS TECHNOLOGY, 1999, 112 (1-3): : 85 - 90
  • [38] Carbon and Tungsten Sputtering in a Helium Magnetron Discharge
    Tiron, Vasile
    Andrei, Codrin
    Nastuta, Andrei V.
    Rusu, George B.
    Vitelaru, Catalin
    Popa, Gheorghe
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2009, 37 (08) : 1581 - 1585
  • [39] On the carbon and tungsten sputtering rate in a magnetron discharge
    Tiron, V.
    Dobrea, S.
    Costin, C.
    Popa, G.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2009, 267 (02): : 434 - 437
  • [40] Effect of carbon content on structure and properties of WCN coatings prepared by RF magnetron sputtering
    Zhao, Hongjian
    Ni, Zenglei
    Ye, Fuxing
    SURFACE & COATINGS TECHNOLOGY, 2016, 287 : 129 - 137
12345