CHARACTERISTICS OF AL MASKLESS PATTERNING USING FOCUSED ION-BEAMS

被引：0

作者：

GAMO, K ^{[1
]}

HUANG, G ^{[1
]}

MORIIZUMI, K ^{[1
]}

SAMOTO, N ^{[1
]}

SHIMIZU, R ^{[1
]}

NAMBA, S ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：864 / 868

页数：5

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