FOCUSED ION-BEAMS IN MICROFABRICATION

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PREWETT, PD

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JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C8期

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页码：C8179 / C8190

页数：12

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[1] FOCUSED ION-BEAMS IN MICROFABRICATION
PREWETT, PD
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (04): : 2364 - 2366
[2] FOCUSED ION-BEAMS IN MICROFABRICATION
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[J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (03) : 1416 - 1422
[3] FOCUSED ION-BEAMS IN MICROFABRICATION
SELIGER, RL
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 1127 - 1127
[4] FOCUSED ION-BEAMS MICROFABRICATION METHODS AND APPLICATIONS (INVITED)
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[J]. VACUUM, 1993, 44 (3-4) : 345 - 351
[5] MICROFABRICATION WITH ION-BEAMS
MURAY, AJ
MURAY, JJ
[J]. VACUUM, 1985, 35 (10-1) : 467 - 477
[6] FOCUSED ION-BEAMS
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[J]. SCIENTIFIC AMERICAN, 1991, 265 (04) : 96 - 101
[7] APPLICATIONS OF FOCUSED ION-BEAMS
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[J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 393 : 167 - 176
[8] FINE FOCUSED ION-BEAMS
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WANG, V
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1982, 21 (01) : 3 - 10
[9] APPLICATIONS OF FOCUSED ION-BEAMS
BANERJEE, I
LIVENGOOD, RH
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1993, 140 (01) : 183 - 188
[10] APPLICATIONS OF FOCUSED ION-BEAMS
WAGNER, A
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3): : 355 - 362