MICROFABRICATION WITH ION-BEAMS

被引：0

作者：

MURAY, AJ ^{[1
]}

MURAY, JJ ^{[1
]}

机构：

[1] SRI INT,MENLO PK,CA 94025

来源：

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：467 / 477

页数：11

共 50 条

[1] FOCUSED ION-BEAMS IN MICROFABRICATION
PREWETT, PD
[J]. JOURNAL DE PHYSIQUE, 1989, 50 (C8): : C8179 - C8190
[2] FOCUSED ION-BEAMS IN MICROFABRICATION
PREWETT, PD
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (04): : 2364 - 2366
[3] FOCUSED ION-BEAMS IN MICROFABRICATION
SELIGER, RL
FLEMING, WP
[J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (03) : 1416 - 1422
[4] FOCUSED ION-BEAMS IN MICROFABRICATION
SELIGER, RL
FLEMING, WP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 1127 - 1127
[5] FOCUSED ION-BEAMS MICROFABRICATION METHODS AND APPLICATIONS (INVITED)
PREWETT, PD
[J]. VACUUM, 1993, 44 (3-4) : 345 - 351
[6] CRYSTALLINE ION-BEAMS
HABS, D
GRIMM, R
[J]. ANNUAL REVIEW OF NUCLEAR AND PARTICLE SCIENCE, 1995, 45 : 391 - 428
[7] ION-BEAMS IN RETROSPECT
FREEMAN, JH
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 55 (1-4): : R9 - R9
[8] INTENSE ION-BEAMS
GREEN, TS
[J]. REPORTS ON PROGRESS IN PHYSICS, 1974, 37 (10) : 1257 - +
[9] ION-BEAMS AND LASERS
GARRISON, BJ
WINOGRAD, N
[J]. CHEMTECH, 1993, 23 (01) : 25 - 31
[10] FOCUSED ION-BEAMS
ORLOFF, J
[J]. SCIENTIFIC AMERICAN, 1991, 265 (04) : 96 - 101