CHARACTERISTICS OF AL MASKLESS PATTERNING USING FOCUSED ION-BEAMS

被引：0
|
作者：
GAMO, K [1 ]
HUANG, G [1 ]
MORIIZUMI, K [1 ]
SAMOTO, N [1 ]
SHIMIZU, R [1 ]
NAMBA, S [1 ]
机构：
[1] OSAKA UNIV,FAC ENGN,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期
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D O I：
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中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
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页码：864 / 868
页数：5
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