AN INTRINSIC STRESS SCALING LAW FOR POLYCRYSTALLINE THIN-FILMS PREPARED BY ION-BEAM SPUTTERING

被引：359

|

作者：

WINDISCHMANN, H

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 05期

关键词：

D O I：

10.1063/1.339560

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1800 / 1807

页数：8

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