AN INTRINSIC STRESS SCALING LAW FOR POLYCRYSTALLINE THIN-FILMS PREPARED BY ION-BEAM SPUTTERING

被引：359
|
作者：
WINDISCHMANN, H
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 05期
关键词：
D O I：
10.1063/1.339560
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1800 / 1807
页数：8
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