DEPOSITION OF THIN-FILMS OF PZT BY A FOCUSED ION-BEAM SPUTTERING TECHNIQUE

被引：11

|

作者：

CASTELLANO, RN

机构：

来源：

FERROELECTRICS | 1980年 / 28卷 / 1-4期

关键词：

D O I：

10.1080/00150198008227115

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：387 / 390

页数：4

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