DEPOSITION OF THIN-FILMS OF PZT BY A FOCUSED ION-BEAM SPUTTERING TECHNIQUE

被引：11
|
作者：
CASTELLANO, RN
机构：
来源：
FERROELECTRICS | 1980年 / 28卷 / 1-4期
关键词：
D O I：
10.1080/00150198008227115
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：387 / 390
页数：4
相关论文
共 50 条
  • [41] SUPERCONDUCTING NBNXCY THIN-FILMS FABRICATED WITH A DUAL ION-BEAM SPUTTERING METHOD
    LIN, LJ
    PROBER, DE
    APPLIED PHYSICS LETTERS, 1986, 49 (07) : 416 - 418
  • [42] THE NUCLEATION AND GROWTH OF THIN-FILMS DEPOSITED ON TO CARBON SUBSTRATE BY ION-BEAM SPUTTERING
    KANAYA, K
    YAMAMOTO, Y
    YONEHARA, K
    JOURNAL OF ELECTRON MICROSCOPY, 1989, 38 (04): : 273 - 273
  • [43] THE NUCLEATION AND GROWTH OF THIN-FILMS DEPOSITED ON TO CARBON SUBSTRATE BY ION-BEAM SPUTTERING
    KANAYA, K
    BABA, N
    YAMAMOTO, Y
    YONEHARA, K
    MICRON AND MICROSCOPICA ACTA, 1988, 19 (04): : 189 - 199
  • [44] FOCUSED ION-BEAM IMAGING OF GRAIN-GROWTH IN COPPER THIN-FILMS
    GUPTA, J
    HARPER, JME
    MAUER, JL
    BLAUNER, PG
    SMITH, DA
    APPLIED PHYSICS LETTERS, 1992, 61 (06) : 663 - 665
  • [45] DEPOSITION OF FERROELECTRIC PZT THIN-FILMS BY PLANAR MULTITARGET SPUTTERING
    BRUCHHAUS, R
    HUBER, H
    PITZER, D
    WERSING, W
    FERROELECTRICS, 1992, 127 (1-4) : 137 - 142
  • [46] COMPARISON OF YBCO THIN-FILMS AND SQUIDS PREPARED BY ION-BEAM DEPOSITION AND RF AND DC UNBALANCED MAGNETRON SPUTTERING
    FOLEY, CP
    FILIPCZUK, SW
    SAVVIDES, N
    DART, DL
    MULLER, KH
    MACFARLANE, JC
    IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (02) : 3036 - 3039
  • [47] DEPOSITION OF RUST PROOF IRON THIN-FILMS WITH SOFT MAGNETIC-PROPERTIES BY DUAL ION-BEAM SPUTTERING
    NAOE, M
    YAMAGA, M
    TERADA, N
    IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (05) : 1900 - 1902
  • [48] ION-BEAM SPUTTERING APPARATUS FOR DEPOSITION OF MULTILAYERED FILMS
    SUZUKI, T
    YAMAZAKI, T
    TAKAHASHI, K
    KAGEYAMA, T
    ODA, H
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1988, 7 (01) : 79 - 80
  • [49] LIFETIMES OF THIN-FILMS IN ION-BEAM EXPERIMENTS
    RAMSAY, D
    NUCLEAR INSTRUMENTS & METHODS, 1979, 167 (01): : 41 - 44
  • [50] A NEW AND SIMPLE ION-SOURCE FOR ION-BEAM ASSISTED DEPOSITION OF THIN-FILMS
    HUBLER, R
    SCHREINER, WH
    BAUMVOL, IJR
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1991, 127 (01): : K19 - K23
12345