PHYSICS OF ION-IMPLANTATION IN PLASMA SURFACE INTERACTIONS

被引：1
|
作者：
MEZEY, G
机构：
[1] Central Research Inst for Physics, Budapest, Hung, Central Research Inst for Physics, Budapest, Hung
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 94卷 / 02期
关键词：
FUSION DEVICES - FUSION RESEARCH - PLASMA-SURFACE INTERACTIONS - SYNERGISM;
D O I：
10.1002/pssa.2210940247
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
(Edited Abstract)
引用
收藏
页码：797 / 807
页数：11
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