PHYSICS OF ION-IMPLANTATION IN PLASMA SURFACE INTERACTIONS

被引：1
|
作者：
MEZEY, G
机构：
[1] Central Research Inst for Physics, Budapest, Hung, Central Research Inst for Physics, Budapest, Hung
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 94卷 / 02期
关键词：
FUSION DEVICES - FUSION RESEARCH - PLASMA-SURFACE INTERACTIONS - SYNERGISM;
D O I：
10.1002/pssa.2210940247
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
(Edited Abstract)
引用
收藏
页码：797 / 807
页数：11
相关论文
共 50 条
  • [21] MODELING AND EXPERIMENT ON PLASMA SOURCE ION-IMPLANTATION
    XIA, ZY
    CHAN, C
    JOURNAL OF APPLIED PHYSICS, 1993, 73 (08) : 3651 - 3656
  • [22] Surface analysis of polymers electrically improved by plasma-source ion-implantation
    Yeonhee Lee
    Seunghee Han
    Hyuneui Lim
    Youngwoo Kim
    Haidong Kim
    Analytical and Bioanalytical Chemistry, 2002, 373 : 595 - 600
  • [23] PLASMA IMMERSION ION-IMPLANTATION (PIII) OF METALS
    BLAWERT, C
    KNOOP, FM
    MORDIKE, BL
    METALL, 1995, 49 (01): : 45 - 50
  • [24] ION-IMPLANTATION AND CATALYSIS - ELECTROCHEMICAL APPLICATIONS OF ION-IMPLANTATION
    WOLF, GK
    NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 875 - 885
  • [25] PLASMA IMMERSION ION-IMPLANTATION - THE ROLE OF DIFFUSION
    COLLINS, GA
    HUTCHINGS, R
    TENDYS, J
    SURFACE & COATINGS TECHNOLOGY, 1993, 59 (1-3): : 267 - 273
  • [26] PLASMA IMMERSION ION-IMPLANTATION FOR ULSI PROCESSING
    CHEUNG, NW
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 55 (1-4): : 811 - 820
  • [27] CONFORMAL IMPLANTATION FOR TRENCH DOPING WITH PLASMA IMMERSION ION-IMPLANTATION
    QIAN, XY
    CHEUNG, NW
    LIEBERMAN, MA
    BRENNAN, R
    CURRENT, MI
    JHA, N
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 55 (1-4): : 898 - 901
  • [28] Surface analysis of polymers electrically improved by plasma-source ion-implantation
    Lee, Y
    Han, S
    Lim, H
    Kim, Y
    Kim, H
    ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 2002, 373 (07) : 595 - 600
  • [29] DEVELOPMENT OF PLASMA SOURCE ION-IMPLANTATION IN CHINA
    TANG, BY
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 867 - 869
  • [30] NITROGEN PLASMA SOURCE ION-IMPLANTATION OF ALUMINUM
    WALTER, KC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 945 - 950
12345