PHYSICS OF ION-IMPLANTATION IN PLASMA SURFACE INTERACTIONS

被引：1

作者：

MEZEY, G

机构：

[1] Central Research Inst for Physics, Budapest, Hung, Central Research Inst for Physics, Budapest, Hung

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 94卷 / 02期

关键词：

FUSION DEVICES - FUSION RESEARCH - PLASMA-SURFACE INTERACTIONS - SYNERGISM;

D O I：

10.1002/pssa.2210940247

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

(Edited Abstract)

引用

页码：797 / 807

页数：11

共 50 条

[41] SURFACE MODIFICATION BY ION-IMPLANTATION - EFFECTS ON FATIGUE
JATA, KV
STARKE, EA
JOURNAL OF METALS, 1983, 35 (08): : 23 - 27
[42] ION-IMPLANTATION
LANGOUCHE, G
HYPERFINE INTERACTIONS, 1991, 68 (1-4): : 95 - 106
[43] ION-IMPLANTATION
HERMAN, H
MANUFACTURING ENGINEERING, 1985, 94 (05): : 11 - 11
[44] ION-IMPLANTATION
PERLOFF, DS
SOLID STATE TECHNOLOGY, 1985, 28 (02) : 127 - 127
[45] Ion-implantation system for near surface studies
Rev Sci Instrum, 11 (5244):
[46] SURFACE CONTAMINATION OF SILICON PRODUCED BY ION-IMPLANTATION
YAMAGUCHI, M
HIRAYAMA, T
JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (02) : 365 - 372
[47] SURFACE MODIFICATION OF INDUSTRIAL COMPONENTS BY ION-IMPLANTATION
SIOSHANSI, P
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 : 667 - 671
[48] SURFACE MODIFICATION OF POLYETHYLENE AND POLYPROPYLENE BY ION-IMPLANTATION
SVORCIK, V
RYBKA, V
ENDRST, R
HNATOWICZ, V
KVITEK, J
SEIDL, P
JOURNAL OF APPLIED POLYMER SCIENCE, 1993, 49 (11) : 1939 - 1942
[49] ION-IMPLANTATION
DROZDA, TJ
MANUFACTURING ENGINEERING, 1985, 94 (01): : 51 - 56
[50] ION-IMPLANTATION
MOREHEAD, FF
CROWDER, BL
SCIENTIFIC AMERICAN, 1973, 228 (04) : 65 - 71