PLASMA SOURCE ION-IMPLANTATION TECHNIQUE FOR SURFACE MODIFICATION OF MATERIALS

被引：997
|
作者：
CONRAD, JR
RADTKE, JL
DODD, RA
WORZALA, FJ
TRAN, NC
机构：
[1] UNIV WISCONSIN,DEPT MET ENGN,MADISON,WI 53706
[2] UNIV WISCONSIN,CTR MAT SCI,MADISON,WI 53706
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 11期
关键词：
D O I：
10.1063/1.339055
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4591 / 4596
页数：6
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