SOURCE MATERIALS FOR ION-IMPLANTATION

被引：10
|
作者：
AXMANN, A [1 ]
机构：
[1] FRAUNHOFEN GESELL,INST ANGEW FESTKORPERPHYS,D 78 FREIBURG,WEST GERMANY
来源：
APPLIED PHYSICS LETTERS | 1973年 / 23卷 / 11期
关键词：
D O I：
10.1063/1.1654778
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：645 / 648
页数：4
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