FORMATION OF STRUCTURE IN POLYSILICON FILMS

被引：2
|
作者：
ALEKSANDROV, LN [1 ]
EDELMAN, FL [1 ]
VOSKOBOINIKOV, VV [1 ]
机构：
[1] ACAD SCI USSR,SEMICOND PHYS INST,NOVOSIBIRSK,USSR
来源：
THIN SOLID FILMS | 1976年 / 32卷 / 02期
关键词：
D O I：
10.1016/0040-6090(76)90303-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：241 / 245
页数：5
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