Test structure to measure the thermal diffusivity of polysilicon films

被引：0
|
作者：
Qi, Lina [1 ]
Huang, Qing'an [1 ]
Xu, Gaobin [1 ]
Li, Weihua [1 ]
机构：
[1] Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China
来源：
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2006年 / 27卷 / 08期
关键词：
16;
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学科分类号：
摘要：
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页码：830 / 834
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