On-line extraction for thermal diffusivity of surface-micromachined polysilicon thin films

被引：0
|
作者：
Qi, Li-Na [1 ]
Huang, Qing-An [1 ]
Li, Wei-Hua [1 ]
机构：
[1] Key Laboratory of MEMS, Southeast University, Nanjing 210096, China
来源：
Tien Tzu Hsueh Pao/Acta Electronica Sinica | 2006年 / 34卷 / 08期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1549 / 1552
相关论文
共 50 条
  • [1] On-line Extracting the Thermal Diffusivity of Surface-micromachined Polysilicon Thin Films
    School of Science, Hefei University of Technology, Hefei 230009, China
    Guti Dianzixue Yanjiu Yu Jinzhan, 2006, 2 (273-278):
  • [2] On-line extraction for thermal conductivity of surface-micromachined polysilicon thin films
    Xu, GB
    Huang, QA
    PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3, 2004, : 1593 - 1596
  • [3] A simple method for measuring the thermal diffusivity of surface-micromachined polysilicon thin films
    Huang, Qing-An
    Xu, Gaobin
    Qi, Lina
    Li, Weihua
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 16 (05) : 981 - 985
  • [4] An online test microstructure for thermal conductivity of surface-micromachined polysilicon thin films
    Xu, GB
    Huang, QA
    IEEE SENSORS JOURNAL, 2006, 6 (02) : 428 - 433
  • [5] In-line method for extracting the temperature coefficient of resistance of surface-micromachined polysilicon thin films
    Xu, Gaobin
    Li, Yang
    Huang, Qing-An
    Li, Weihua
    SENSORS AND ACTUATORS A-PHYSICAL, 2007, 136 (01) : 249 - 254
  • [6] Applications for surface-micromachined polysilicon thermal actuators and arrays
    Comtois, JH
    Bright, VM
    SENSORS AND ACTUATORS A-PHYSICAL, 1997, 58 (01) : 19 - 25
  • [7] Actuation of polysilicon surface-micromachined mirrors
    Tien, NC
    Kiang, MH
    Daneman, MJ
    Solgaard, O
    Lau, KY
    Muller, RS
    MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS, 1996, 2687 : 53 - 59
  • [8] Surface-micromachined flexible polysilicon sensor array
    Hwang, ES
    Kim, YJ
    Ju, BK
    MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, 2003, : 582 - 585
  • [9] Surface-micromachined polysilicon MOEMS for adaptive optics
    Comtois, J
    Michalicek, A
    Cowan, W
    Butler, J
    SENSORS AND ACTUATORS A-PHYSICAL, 1999, 78 (01) : 54 - 62
  • [10] Gamma Irradiation Effects on Surface-Micromachined Polysilicon Resonators
    Wang, Lei
    Tang, Jieying
    Huang, Qing-An
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2011, 20 (05) : 1071 - 1073
12345