On-line extraction for thermal diffusivity of surface-micromachined polysilicon thin films

被引：0
|
作者：
Qi, Li-Na [1 ]
Huang, Qing-An [1 ]
Li, Wei-Hua [1 ]
机构：
[1] Key Laboratory of MEMS, Southeast University, Nanjing 210096, China
来源：
Tien Tzu Hsueh Pao/Acta Electronica Sinica | 2006年 / 34卷 / 08期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1549 / 1552
相关论文
共 50 条
  • [41] Sensing sensibility of surface micromachined suspended gate polysilicon thin film transistors
    Mahfoz-Kotb, H.
    Salaun, A. C.
    Bendriaa, F.
    Le Bihan, F.
    Mohammed-Brahim, T.
    Morante, J. R.
    SENSORS AND ACTUATORS B-CHEMICAL, 2006, 118 (1-2) : 243 - 248
  • [42] Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography
    Jayaraman, Balaji
    Singh, Vijay Raj
    Asundi, Anand
    Bhat, Navakanta
    Hegde, Gopalkrishna M.
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2010, 21 (01)
  • [43] Thermal simulation of surface micromachined polysilicon hot plates of low power consumption
    Dumitrescu, M
    Cobianu, C
    Lungu, D
    Dascalu, D
    Pascu, A
    Kolev, S
    van den Berg, A
    SENSORS AND ACTUATORS A-PHYSICAL, 1999, 76 (1-3) : 51 - 56
  • [44] Thermal simulation of surface micromachined polysilicon hot plates of low power consumption
    Dumitrescu, M
    Cobianu, C
    Lungu, D
    Dascalu, D
    Pascu, A
    Kolev, S
    van den Berg, A
    CAS'98 PROCEEDINGS - 1998 INTERNATIONAL SEMICONDUCTOR CONFERENCE, 21ST EDITION, VOLS 1 AND 2, 1998, : 83 - 86
  • [45] Thermal simulation of surface micromachined polysilicon hot plates of low power consumption
    Dumitrescu, M
    Cobianu, C
    Lungu, D
    Dascalu, D
    Pascu, A
    Kolev, S
    van den Berg, A
    EUROSENSORS XII, VOLS 1 AND 2, 1998, : 1202 - 1205
  • [46] Determination of the Thermoelectric Figure of Merit of Doped Polysilicon Thin Films by Micromachined Test Structures
    Moser, D.
    Ilkaya, D.
    Kopp, D.
    Paul, O.
    2012 IEEE SENSORS PROCEEDINGS, 2012, : 989 - 992
  • [47] Measurement of thermal diffusivity of thin films by thermal pulse method
    Pan, Shanzhao
    Xie, Jiao
    Zheng, Feihu
    An, Zhenlian
    Zhang, Yewen
    2018 IEEE 2ND INTERNATIONAL CONFERENCE ON DIELECTRICS (ICD), 2018,
  • [48] Evaluation of mechanical properties and strain criterion for realibility design of micromachined polysilicon thin films
    Ding, JN
    Yang, JC
    Cai, L
    Wen, SZ
    INTERNATIONAL JOURNAL OF NONLINEAR SCIENCES AND NUMERICAL SIMULATION, 2002, 3 (3-4) : 657 - 660
  • [49] Photoacoustic thermal characterization of low thermal diffusivity thin films
    Herrmann, K.
    Pech-May, N. W.
    Retsch, M.
    PHOTOACOUSTICS, 2021, 22
  • [50] A novel deposition technique for fluorocarbon films and its applications for bulk- and surface-micromachined devices
    Matsumoto, Y
    Yoshida, K
    Ishida, M
    SENSORS AND ACTUATORS A-PHYSICAL, 1998, 66 (1-3) : 308 - 314
12345