On-line extraction for thermal diffusivity of surface-micromachined polysilicon thin films

被引：0
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作者：
Qi, Li-Na [1 ]
Huang, Qing-An [1 ]
Li, Wei-Hua [1 ]
机构：
[1] Key Laboratory of MEMS, Southeast University, Nanjing 210096, China
来源：
Tien Tzu Hsueh Pao/Acta Electronica Sinica | 2006年 / 34卷 / 08期
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页码：1549 / 1552
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