LOW-TEMPERATURE EPITAXIAL-GROWTH OF (100) SILICON

被引:3
|
作者
MILOSAVLJEVIC, M [1 ]
JEYENS, C [1 ]
WILSON, IH [1 ]
机构
[1] UNIV SURREY,GUILDFORD GU2 5XH,SURREY,ENGLAND
关键词
D O I
10.1049/el:19830456
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:669 / 671
页数:3
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