共 50 条
- [35] LOW-TEMPERATURE SILICON EPITAXIAL-GROWTH BY PHOTOCHEMICAL VAPOR-DEPOSITION USING VACUUM ULTRAVIOLET-LIGHT JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (07): : L1189 - L1192
- [36] LOW-TEMPERATURE PRETREATMENT IN CHEMICAL VAPOR-DEPOSITION OF A SILICON FILM FOR SOLID-PHASE EPITAXIAL-GROWTH JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (10): : L1983 - L1985
- [37] LOW-TEMPERATURE EPITAXIAL-GROWTH OF SILICON AND SILICON-GERMANIUM ALLOY BY ULTRAHIGH-VACUUM CHEMICAL-VAPOR-DEPOSITION JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (1A): : 240 - 246