Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan

被引：5

作者：

Misumi, Ichiko ^{[1
]}

Kizu, Ryosuke ^{[1
]}

Itoh, Hiroshi ^{[1
]}

Kumagai, Kazuhiro ^{[1
]}

Kobayashi, Keita ^{[1
]}

Sigehuzi, Tomoo ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, 1-1-1 Higashi, Tsukuba, Ibaraki 3058565, Japan

来源：

NANOMANUFACTURING AND METROLOGY | 2022年 / 5卷 / 02期

基金：

日本科学技术振兴机构;

关键词：

Nanodimensional standards; Calibration; Uncertainty; AFM; TEM; SEM; ROUGHNESS MEASUREMENTS; TRACEABLE CALIBRATION; RESOLUTION; AFM; NANOPARTICLES; UNCERTAINTY; ACCURATE; RANGE; LINE; SIZE;

D O I：

10.1007/s41871-021-00119-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

With the progress in nanotechnology, the importance of nanodimensional standards is increasing. Realizing nanodimensional standards requires multiple types of high-precision microscopy techniques. The National Metrology Institute of Japan (NMIJ), one of the research domains in the National Institute of Advanced Industrial Science and Technology (AIST), is developing nanodimensional standards using atomic force, transmission electron, and scanning electron microscopes. The current status of nanodimensional standards in NMIJ is introduced herein.

引用

页码：83 / 90

页数：8

共 50 条

[21] A compact nano manipulator based on an atomic force microscope coupling with a scanning electron microscope or an inverted optical microscope
Futoshi Iwata
Yuya Mizuguchi
Hideyuki Ko
Tatsuo Ushiki
Journal of Micro-Bio Robotics, 2013, 8 (1) : 25 - 32
[22] A compact nano manipulator based on an atomic force microscope coupling with a scanning electron microscope or an inverted optical microscope
Iwata, Futoshi
Mizuguchi, Yuya
Ko, Hideyuki
Ushiki, Tatsuo
Journal of Micro-Nano Mechatronics, 2013, 8 (01): : 25 - 32
[23] MORPHOLOGICAL BASIS OF PROTEINURIA - STUDY USING TRANSMISSION ELECTRON-MICROSCOPE AND SCANNING ELECTRON-MICROSCOPE
GALLE, P
BERRY, JP
JOURNAL DE MICROSCOPIE, 1974, 20 (01): : A50 - A50
[24] Investigation of structural change of purple membrane in storage by transmission electron microscope and atomic force microscope
Li, XD
Li, ZL
Yan, JS
Li, H
Han, BS
Hu, KS
Wang, AJ
CHINESE SCIENCE BULLETIN, 2001, 46 (20): : 1753 - 1756
[25] Investigation of structural change of purple membrane in storage by transmission electron microscope and atomic force microscope
LI Xiaodong
2. State Key Laboratory of Magnetism
3. Photosynthesis Research Center
4. Institute of Biophysics
ChineseScienceBulletin, 2001, (20) : 1753 - 1756
[26] A Platform for Atomic Fabrication and In Situ Synthesis in a Scanning Transmission Electron Microscope
Dyck, Ondrej
Lupini, Andrew R.
Jesse, Stephen
SMALL METHODS, 2023, 7 (10)
[27] Erratum: Atomic-resolution chemical analysis using a scanning transmission electron microscope
N. D. Browning
M. F. Chisholm
S. J. Pennycook
Nature, 2006, 444 : 235 - 235
[28] Mechanical Characterization of Nickel Nanowires by using a Customized Atomic Microscope in Scanning Electron Microscope
Celik, Emrah
Guven, Ibrahim
Madenci, Erdogan
2011 IEEE 61ST ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2011, : 1999 - 2006
[29] Note: A scanning electron microscope sample holder for bidirectional characterization of atomic force microscope probe tips
Eisenstein, Alon
Goh, M. Cynthia
REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (03):
[30] Submicrometre-pitch intercomparison between optical ditiraction, scanning electron microscope and atomic force microscope
Misumi, I
Gonda, S
Kurosawa, T
Tanimura, Y
Ochiai, N
Kitta, JI
Kubota, F
Yamada, M
Fujiwara, Y
Nakayama, Y
Takamasu, K
MEASUREMENT SCIENCE AND TECHNOLOGY, 2003, 14 (12) : 2065 - 2074

← 1 2 3 4 5 →