Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan

被引：5

作者：

Misumi, Ichiko ^{[1
]}

Kizu, Ryosuke ^{[1
]}

Itoh, Hiroshi ^{[1
]}

Kumagai, Kazuhiro ^{[1
]}

Kobayashi, Keita ^{[1
]}

Sigehuzi, Tomoo ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, 1-1-1 Higashi, Tsukuba, Ibaraki 3058565, Japan

来源：

NANOMANUFACTURING AND METROLOGY | 2022年 / 5卷 / 02期

基金：

日本科学技术振兴机构;

关键词：

Nanodimensional standards; Calibration; Uncertainty; AFM; TEM; SEM; ROUGHNESS MEASUREMENTS; TRACEABLE CALIBRATION; RESOLUTION; AFM; NANOPARTICLES; UNCERTAINTY; ACCURATE; RANGE; LINE; SIZE;

D O I：

10.1007/s41871-021-00119-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

With the progress in nanotechnology, the importance of nanodimensional standards is increasing. Realizing nanodimensional standards requires multiple types of high-precision microscopy techniques. The National Metrology Institute of Japan (NMIJ), one of the research domains in the National Institute of Advanced Industrial Science and Technology (AIST), is developing nanodimensional standards using atomic force, transmission electron, and scanning electron microscopes. The current status of nanodimensional standards in NMIJ is introduced herein.

引用

页码：83 / 90

页数：8

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