Note: A scanning electron microscope sample holder for bidirectional characterization of atomic force microscope probe tips

被引:0
|
作者
Eisenstein, Alon [1 ]
Goh, M. Cynthia
机构
[1] Univ Toronto, Dept Chem, Toronto, ON M5S 3H6, Canada
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2012年 / 83卷 / 03期
基金
加拿大自然科学与工程研究理事会;
关键词
ENHANCED RAMAN-SPECTROSCOPY; NANOSCALE CHEMICAL-ANALYSIS; RESOLUTION;
D O I
10.1063/1.3698073
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A novel sample holder that enables atomic force microscopy (AFM) tips to be mounted inside a scanning electron microscopy (SEM) for the purpose of characterizing the AFM tips is described. The holder provides quick and easy handling of tips by using a spring clip to hold them in place. The holder can accommodate two tips simultaneously in two perpendicular orientations, allowing both top and side view imaging of the tips by the SEM. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3698073]
引用
收藏
页数:3
相关论文
共 50 条
  • [1] Examination of atomic (scanning) force microscopy probe tips with the transmission electron microscope
    DeRose, JA
    Revel, JP
    MICROSCOPY AND MICROANALYSIS, 1997, 3 (03) : 203 - 213
  • [2] SAMPLE HOLDER WITH ELECTRICAL CONTACTS FOR SCANNING ELECTRON MICROSCOPE
    BLAZEK, HF
    THOMAS, JE
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1970, 41 (01): : 135 - &
  • [3] A versatile atomic force microscope integrated with a scanning electron microscope
    Kreith, J.
    Strunz, T.
    Fantner, E. J.
    Fantner, G. E.
    Cordill, M. J.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2017, 88 (05):
  • [4] CHARACTERIZATION OF SCANNING PROBE MICROSCOPE TIPS FOR LINEWIDTH MEASUREMENT
    GRIFFITH, JE
    GRIGG, DA
    VASILE, MJ
    RUSSELL, PE
    FITZGERALD, EA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3586 - 3589
  • [5] Mechanical characterization of nanofibers using a nanomanipulator and atomic force microscope cantilever in a scanning electron microscope
    Hwang, Kenny Yoonki
    Kim, Sung-Dae
    Kim, Young-Woon
    Yu, Woong-Ryeol
    POLYMER TESTING, 2010, 29 (03) : 375 - 380
  • [6] Atomic force microscope integrated with a scanning electron microscope for tip fabrication
    Walters, D.A., 1600, American Inst of Physics, Woodbury, NY, United States (65):
  • [7] Development of a versatile atomic force microscope within a scanning electron microscope
    Fukushima, K
    Saya, D
    Kawakatsu, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (6B): : 3747 - 3749
  • [8] Cross-sectional atomic force microscope in scanning electron microscope
    Park, Byong Chon
    Song, Woon
    Kim, Dal Hyun
    Lee, Ju-Yeop
    Hong, Jaewan
    Kim, Jin Seung
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2014, 32 (06):
  • [10] Redesigned Sensor Holder for an Atomic Force Microscope with an Adjustable Probe Direction
    Janik Schaude
    Maxim Fimushkin
    Tino Hausotte
    International Journal of Precision Engineering and Manufacturing, 2021, 22 : 1563 - 1571