Note: A scanning electron microscope sample holder for bidirectional characterization of atomic force microscope probe tips

被引:0
|
作者
Eisenstein, Alon [1 ]
Goh, M. Cynthia
机构
[1] Univ Toronto, Dept Chem, Toronto, ON M5S 3H6, Canada
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2012年 / 83卷 / 03期
基金
加拿大自然科学与工程研究理事会;
关键词
ENHANCED RAMAN-SPECTROSCOPY; NANOSCALE CHEMICAL-ANALYSIS; RESOLUTION;
D O I
10.1063/1.3698073
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A novel sample holder that enables atomic force microscopy (AFM) tips to be mounted inside a scanning electron microscopy (SEM) for the purpose of characterizing the AFM tips is described. The holder provides quick and easy handling of tips by using a spring clip to hold them in place. The holder can accommodate two tips simultaneously in two perpendicular orientations, allowing both top and side view imaging of the tips by the SEM. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3698073]
引用
收藏
页数:3
相关论文
共 50 条
  • [31] Design of a scanning probe microscope with advanced sample treatment capabilities: An atomic force microscope combined with a miniaturized inductively coupled plasma source
    Hund, Markus
    Herold, Hans
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (06):
  • [32] CALIBRATION OF ATOMIC-FORCE MICROSCOPE TIPS
    HUTTER, JL
    BECHHOEFER, J
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (07): : 1868 - 1873
  • [33] SCANNING ION-CONDUCTANCE MICROSCOPE AND ATOMIC FORCE MICROSCOPE
    PRATER, CB
    DRAKE, B
    GOULD, SAC
    HANSMA, HG
    HANSMA, PK
    SCANNING, 1990, 12 (01) : 50 - 52
  • [34] Fabrication of a Si scanning probe microscopy tip with an ultrahigh vacuum-scanning tunneling microscope/atomic force microscope
    Ono, Takahito
    Saitoh, Hiroaki
    Esashi, Masayoshi
    Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1997, 15 (04):
  • [35] Fabrication of a Si scanning probe microscopy tip with an ultrahigh vacuum-scanning tunneling microscope atomic force microscope
    Ono, T
    Saitoh, H
    Esashi, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (04): : 1531 - 1534
  • [36] ATOMIC-FORCE MICROSCOPE USING PIEZORESISTIVE CANTILEVERS AND COMBINED WITH A SCANNING ELECTRON-MICROSCOPE
    STAHL, U
    YUAN, CW
    DELOZANNE, AL
    TORTONESE, M
    APPLIED PHYSICS LETTERS, 1994, 65 (22) : 2878 - 2880
  • [37] Mechanical Characterization of Nickel Nanowires by using a Customized Atomic Microscope in Scanning Electron Microscope
    Celik, Emrah
    Guven, Ibrahim
    Madenci, Erdogan
    2011 IEEE 61ST ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2011, : 1999 - 2006
  • [38] Effective probe for scanning electron microscope
    Larionov, Yu. V.
    Novikov, Yu. A.
    INTERNATIONAL CONFERENCE MICRO- AND NANO-ELECTRONICS 2012, 2012, 8700
  • [39] Effect of scanning force microscope scanner geometry on probe-sample contact force
    Chen, X
    Davies, MC
    Roberts, CJ
    Tendler, SJB
    Williams, PM
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1997, 68 (04): : 1773 - 1775
  • [40] Determination of damping force between atomic force microscope tips and sample using an inverse methodology
    Chang, WJ
    Lin, CM
    Lee, JF
    Lin, SL
    PHYSICS LETTERS A, 2005, 343 (1-3) : 79 - 84