CALIBRATION OF ATOMIC-FORCE MICROSCOPE TIPS

被引：3398
|
作者：
HUTTER, JL
BECHHOEFER, J
机构：
[1] Department of Physics, Simon Fraser University, Burnaby
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1993年 / 64卷 / 07期
关键词：
D O I：
10.1063/1.1143970
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Images and force measurements taken by an atomic-force microscope (AFM) depend greatly on the properties of the spring and tip used to probe the sample's surface. In this article, we describe a simple, nondestructive procedure for measuring the force constant, resonant frequency, and quality factor of an AFM cantilever spring and the effective radius of curvature of an AFM tip. Our procedure uses the AFM itself and does not require additional equipment.
引用
收藏
页码：1868 / 1873
页数：6
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