Atomically thin indium oxide transistors

被引：0

作者：

Seong Keun Kim

机构：

[1] Korea Institute of Science and Technology,Electronic Materials Research Center

[2] Korea University,KU

来源：

Nature Electronics | 2022年 / 5卷

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Indium oxide transistors with an ultrashort channel of less than 10 nm can be fabricated using atomic layer deposition, a technique that is compatible with complementary metal–oxide–semiconductor (CMOS) processes.

引用

页码：129 / 130

页数：1

共 50 条

[31] Dual Gate Thin Film Transistors Based on Indium Oxide Active Layers
Kekuda, Dhananjaya
Rao, K. Mohan
Tolpadi, Amita
Chu, C. W.
SOLID STATE PHYSICS: PROCEEDINGS OF THE 55TH DAE SOLID STATE PHYSICS SYMPOSIUM 2010, PTS A AND B, 2011, 1349 : 1081 - +
[32] Amorphous Indium-Zinc Oxide Semiconductor Thin-Film Transistors
Li, Jun-Yi
Chang, Sheng-Po
Hua, Wen-Chen
Chang, Shoou-Jinn
JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, 2014, 9 (03) : 388 - 391
[33] The influence of annealing atmosphere on sputtered indium oxide thin-film transistors
Xiao, Na
Yuvaraja, Saravanan
Chettri, Dhanu
Liu, Zhiyuan
Lu, Yi
Liao, Chehao
Tang, Xiao
Li, Xiaohang
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2023, 56 (42)
[34] The effect of annealing on amorphous indium gallium zinc oxide thin film transistors
Bae, Hyeon-seok
Kwon, Jae-Hong
Chang, Seongpil
Chung, Myung-Ho
Oh, Tae-Yeon
Park, Jung-Ho
Lee, Sang Yeol
Pak, James Jungho
Ju, Byeong-Kwon
THIN SOLID FILMS, 2010, 518 (22) : 6325 - 6329
[35] High Stability of Inkjet Printed Indium Zinc Oxide Thin Film Transistors
Park, Kyung-Bae
Ryu, Myung-Kwan
Seon, Jong-Baek
Lee, Kwang-Hee
Lee, Sang-Yoon
Jeong, Woong Hee
Bae, Jung Hyun
Kim, Hyun Jae
IDW'10: PROCEEDINGS OF THE 17TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2010, : 1837 - 1838
[36] Ultrathin Indium Oxide Thin-Film Transistors With Gigahertz Operation Frequency
Charnas, Adam
Anderson, Jackson
Zhang, Jie
Zheng, Dongqi
Weinstein, Dana
Ye, Peide D. D.
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2023, 70 (02) : 532 - 536
[37] Magnesium-doped Indium Oxide Thin Film Transistors for Ultraviolet Detection
Bi, Xiaobin
Yao, Jianke
Zhang, Shengdong
2014 IEEE INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS (EDSSC), 2014,
[38] Atomically smooth and single crystalline indium tin oxide thin film with low optical loss
Yasuhara, Ryuichiro
Murai, Shunsuke
Fujita, Koji
Tanaka, Katsuhisa
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 9, NO 12, 2012, 9 (12): : 2533 - 2536
[39] Sol–gel processed indium zinc oxide thin film and transparent thin-film transistors
Xifeng Li
Qian Li
Enlong Xin
Jianhua Zhang
Journal of Sol-Gel Science and Technology, 2013, 65 : 130 - 134
[40] High mobility thin film transistors with indium oxide/gallium oxide bi-layer structures
Wang, S. -L.
Yu, J. -W.
Yeh, P. -C.
Kuo, H. -W.
Peng, L. -H.
Fedyanin, A. A.
Mishina, E. D.
Sigov, A. S.
APPLIED PHYSICS LETTERS, 2012, 100 (06)

← 1 2 3 4 5 →