Characterization of sol–gel thin films by ellipsometric porosimetry

被引：0
|
作者：
Peer Löbmann
机构：
[1] Fraunhofer-Institut für Silicatforschung,
来源：
Journal of Sol-Gel Science and Technology | 2017年 / 84卷
关键词：
Ellipsometric Porosimetry; Sol–gel; Thin films; Porosity;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：2 / 15
页数：13
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