Three-dimensional nanopositioning and nanomeasuring machine with a resolution of 0.1 nm

被引：0
|
作者：
G. Jäger
机构：
[1] Ilmenau University of Technology,Institute of Process Measurement and Sensor Technology
来源：
Optoelectronics, Instrumentation and Data Processing | 2010年 / 46卷 / 4期
关键词：
NMM-1 machine; Abbe-error-free design; nanoprobes;
D O I：
10.3103/S8756699010040035
中图分类号：
学科分类号：
摘要：
The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of a high-precision long-range three-dimensional nanopositioning and nanomeasuring machine (NMM-1) having a resolution of 0.1 nm over the positioning and measuring range of 25 × 25 × 5 mm is explained. Various developed probe systems have been integrated into the NMM-1 machine, including a focus sensor, a white light sensor, and tactile nanoprobes. Single-beam, double-beam, and triple-beam interferometers are installed into the NMM-1 machine to measure and control the six degrees of freedom. Measured results are presented.
引用
收藏
页码：318 / 323
页数：5
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