Three-dimensional nanopositioning and nanomeasuring machine with a resolution of 0.1 nm

The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of a high-precision long-range three-dimensional nanopositioning and nanomeasuring machine (NMM-1) having a resolution of 0.1 nm over the positioning and measuring range of 25 × 25 × 5 mm is explained. Various developed probe systems have been integrated into the NMM-1 machine, including a focus sensor, a white light sensor, and tactile nanoprobes. Single-beam, double-beam, and triple-beam interferometers are installed into the NMM-1 machine to measure and control the six degrees of freedom. Measured results are presented.