Probe and Spectral Diagnostics of the Plasma of the BCl3–Cl2 Gas Medium

Abstract: The probe and spectral measurements of the plasma of the BCl3–Cl2 gas medium are carried out. Data are obtained on the influence of the initial composition of the gas medium on the electric field strength, gas temperature, particle concentration, and reduced electric field strength under conditions of a direct current glow discharge. The emission spectra of the plasma of the BCl3–Cl2 gas medium are analyzed, the main emitting components are identified, and the relationships between radiation intensities and particle concentrations are established. © Pleiades Publishing, Ltd. 2023. ISSN 1063-7397, Russian Microelectronics, 2023, Vol. 52, No. 6, pp. 469–474. Pleiades Publishing, Ltd., 2023. Russian Text The Author(s), 2023, published in Mikroelektronika, 2023, Vol. 52, No. 6, pp. 443–448.