Influence of surface stress on frequency of microcantilever-based biosensors

被引：0
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作者：
Q. Ren
Y.-P. Zhao
机构：
[1] Chinese Academy of Sciences,State Key Laboratory of Nonlinear Mechanics (LNM), Institute of Mechanics
来源：
Microsystem Technologies | 2005年 / 11卷
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页码：456 / 456
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