Microcantilever-based Sensors

被引：30
|
作者：
Chaudhary, Monika [1 ]
Gupta, Amita [1 ]
机构：
[1] Solid State Phys Lab, Delhi 110054, India
来源：
DEFENCE SCIENCE JOURNAL | 2009年 / 59卷 / 06期
关键词：
Sensors; microcantilevers; micromachnied cantilever platforms; detection; hazardous chemicals; explosives chemical sensors; biological sensors; SIMULATION; MECHANICS;
D O I：
10.14429/dsj.59.1569
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
Micromachined cantilever platform offers an opportunity for the development and mass production of extremely sensitive low-cost sensors for real time in situ sensing of many chemical, explosives and biological species. These sensors have been used for measuring and detecting various hazardous chemicals, explosives, and biological agents, leading to the development of hand-held labs. In this paper, different geometries of microcantilevers have been analysed, and their performances in terms of deflection and shift in resonance frequency due to additional mass of analyte have been simulated. The results of these studies can be used to increase the sensitivity of these devices.
引用
收藏
页码：634 / 641
页数：8
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