Investigation of actuation voltage for non-uniform serpentine flexure design of RF-MEMS switch

被引：0
|
作者：
Ashish Kumar Sharma
Navneet Gupta
机构：
[1] Birla Institute of Technology and Science,Department of Electrical and Electronics Engineering
来源：
Microsystem Technologies | 2014年 / 20卷
关键词：
Serpentine; Spring Constant; Actuation Voltage; Span Beam; Beam Segment;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
This paper presents an attempt to reduce the actuation voltage of capacitive RF-MEMS switch by introducing the concept of non-uniform serpentine flexure suspensions. The spring constant of non-uniform serpentine flexure with different meander sections have been equated by analytical expression and verified with finite element method (FEM). FEM analysis indicate actuation voltage as low as 5 V with single meander section for the proposed non-uniform serpentine spring design, which is reasonably low as compared to uniform serpentine spring with same span beam length.
引用
收藏
页码：413 / 418
页数：5
相关论文
共 50 条
  • [21] Design and analysis of serpentine meander asymmetric cantilever RF-MEMS shunt capacitive switch
    Sailaja, B. V. S.
    Naik, Ketavath Kumar
    ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING, 2020, 102 (03) : 593 - 603
  • [22] Design and analysis of serpentine meander asymmetric cantilever RF-MEMS shunt capacitive switch
    B. V. S. Sailaja
    Ketavath Kumar Naik
    Analog Integrated Circuits and Signal Processing, 2020, 102 : 593 - 603
  • [23] Novel Low-Voltage RF-MEMS Switch: Design and Simulation
    Ya, Ma Li
    Soin, Norhayati
    Nordin, Anis Nurashikin
    2014 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS (ICSE), 2014, : 142 - 145
  • [24] Novel Design of MEMS Ohmic RF Switch with Low Voltage Actuation
    Samaali, Hatem
    Najar, Fehmi
    Choura, Slim
    Nayfeh, Ali H.
    Masmoudi, Mohamed
    2009 3RD INTERNATIONAL CONFERENCE ON SIGNALS, CIRCUITS AND SYSTEMS (SCS 2009), 2009, : 358 - +
  • [25] Low Actuation Voltage RF MEMS Shunt Capacitive Switch Based On Rotated Serpentine Spring
    Saffari, Hassan
    Moghadam, Reza Askari
    Tahmasebipour, Mohammad
    2017 25TH IRANIAN CONFERENCE ON ELECTRICAL ENGINEERING (ICEE), 2017, : 293 - 297
  • [26] Analysis of RF MEMS shunt capacitive switch with uniform and non-uniform meanders
    K. Girija Sravani
    K. Srinivasa Rao
    Microsystem Technologies, 2018, 24 : 1309 - 1315
  • [27] Analysis of RF MEMS shunt capacitive switch with uniform and non-uniform meanders
    Sravani, K. Girija
    Rao, K. Srinivasa
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2018, 24 (02): : 1309 - 1315
  • [28] Design and Optimization of a Low-Voltage Shunt Capacitive RF-MEMS Switch
    Ya, Ma Li
    Soin, Norhayati
    Nordin, Anis Nurashikin
    2014 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP), 2014, : 205 - 210
  • [29] Low Actuation Voltage: RF MEMS Series Switch
    Paul, George Rahul
    Kiran, Usha K.
    PROCEEDINGS OF THE 2016 IEEE INTERNATIONAL CONFERENCE ON WIRELESS COMMUNICATIONS, SIGNAL PROCESSING AND NETWORKING (WISPNET), 2016, : 2383 - 2385
  • [30] A Low Actuation Voltage Capacitive RF MEMS Switch
    Song, Mingxin
    Yin, Jinghua
    Song, Liang
    ISTM/2009: 8TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-6, 2009, : 1831 - 1834
12345