Investigation of actuation voltage for non-uniform serpentine flexure design of RF-MEMS switch

被引：0
|
作者：
Ashish Kumar Sharma
Navneet Gupta
机构：
[1] Birla Institute of Technology and Science,Department of Electrical and Electronics Engineering
来源：
Microsystem Technologies | 2014年 / 20卷
关键词：
Serpentine; Spring Constant; Actuation Voltage; Span Beam; Beam Segment;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
This paper presents an attempt to reduce the actuation voltage of capacitive RF-MEMS switch by introducing the concept of non-uniform serpentine flexure suspensions. The spring constant of non-uniform serpentine flexure with different meander sections have been equated by analytical expression and verified with finite element method (FEM). FEM analysis indicate actuation voltage as low as 5 V with single meander section for the proposed non-uniform serpentine spring design, which is reasonably low as compared to uniform serpentine spring with same span beam length.
引用
收藏
页码：413 / 418
页数：5
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