c-axis-textured LiNbO3 thin films on Si (111) substrates

被引：0

作者：

S.D. Cheng

X.Q. Han

C.H. Kam

Y. Zhou

Y.L. Lam

J.T. Oh

X.W. Xu

T.C. Chong

机构：

[1] Data Storage Institute,

[2] DSI Building,undefined

[3] 5,undefined

[4] Engineering Drive 1,undefined

[5] National University of Singapore,undefined

[6] 117608,undefined

[7] Singapore,undefined

[8] Photonics Research Group,undefined

[9] Schoolof Electrical and Electronic Engineering,undefined

[10] Nanyang Technological University,undefined

[11] Nanyang Avenue,undefined

[12] 639798,undefined

[13] Singapore,undefined

[14] Advanced Characterization Laboratory,undefined

[15] School of Applied Science,undefined

[16] Nanyang Technological University,undefined

[17] Nanyang Avenue,undefined

[18] 639798,undefined

[19] Singapore,undefined

来源：

Applied Physics A | 2001年 / 73卷

关键词：

PACS: 68.55.Jk; 77.84.S; 81.20.Fw;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

We have successfully prepared highly c-axis-textured LiNbO3 films on hydrogen-terminated Si (111) substrate using sol-gel spin-coating and rapid thermal annealing. These highly c-axis-textured films were obtained with a preheating at 300 °C for 15 min followed by a rapid thermal annealing at 500–700 °C for 120 s. The c-axis orientation of the LiNbO3 film is due to a weak effect caused by the 3-fold symmetry match between the film and the Si (111) substrate. The c-axis orientation of LiNbO3 films is very useful in integrated optics devices and metal–ferroelectric–semiconductor nonvolatile memory applications.

引用

页码：511 / 514

页数：3

共 50 条

[31] Growth of epitaxial YSZ films on LiNbO3 substrates
Rubí, R
Fàbrega, L
Sandiumenge, F
Fontcuberta, J
Estop, E
THIN SOLID FILMS, 2001, 400 (1-2) : 144 - 148
[32] LiNbO3 thin films grown on MgO (100) substrates by pulsed laser deposition
Stankova, NE
Tonchev, SH
Gyorgy, E
Socol, G
Mihailescu, IN
ROMOPTO 2003: SEVENTH CONFERENCE ON OPTICS, 2004, 5581 : 498 - 501
[33] Annealing effect on properties of ZnO thin films grown on LiNbO3 substrates by MOCVD
Wang, YZ
Wang, HL
Li, SZ
Zhou, SM
Hang, Y
Xu, J
Ye, JD
Gu, SL
Zhang, R
JOURNAL OF CRYSTAL GROWTH, 2005, 284 (3-4) : 319 - 323
[34] Microstructure of LiNbO3 thin films grown on silicon substrates by pulsed laser deposition
Lu, HM
Ye, ZZ
Huang, JY
Wang, L
Zhao, BH
JOURNAL OF INORGANIC MATERIALS, 2005, 20 (04) : 971 - 975
[35] Highly c-axis oriented AlN films deposited on LiNbO3 substrates for surface acoustic wave devices
Cheng, CC
Kao, KS
Chen, YC
PROCEEDINGS OF THE 2001 12TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS I AND II, 2001, : 439 - 442
[36] ZnO thin films deposited on various LiNbO3 substrates by RF-sputtering
Yamamoto, H
Saiga, N
Nishimori, K
APPLIED SURFACE SCIENCE, 2001, 169 : 517 - 520
[37] Oriented growth of LiNbO3 thin films on amorphous substrates in a low electric field
Wu, Zhuang-Chun
Hu, Wei-Sheng
Liu, Jun-Ming
Wang, Mu
Liu, Zhi-Guo
Wuli Xuebao/Acta Physica Sinica, 1998, 47 (02): : 243 - 244
[38] Electro-optic properties of c-axis oriented LiNbO3 films grown on Si(100) substrate
Akazawa, H
Shimada, M
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2005, 120 (1-3): : 50 - 54
[39] The AC conductivity and dielectric constant of (006) textured LiNbO3 films
Gupta, V
Tomar, M
Bhattacharya, P
Sreenivas, K
Katiyar, RS
FERROELECTRICS LETTERS SECTION, 2005, 32 (5-6) : 125 - 130
[40] Deposition of LiNbO3 thin films on diamond/Si(100) substrates for high frequency surface acoustic wave filter applications
Wang, Shunxi
Rabson, Thomas A.
Su, Qingxin
Robert, Marc A.
Integrated Ferroelectrics, 1999, 25 (01): : 37 - 46

← 1 2 3 4 5 →