Fabrication of a terahertz quantum-cascade laser with a double metal waveguide based on multilayer GaAs/AlGaAs heterostructures

被引：0
|
作者：
R. A. Khabibullin
N. V. Shchavruk
A. Yu. Pavlov
D. S. Ponomarev
K. N. Tomosh
R. R. Galiev
P. P. Maltsev
A. E. Zhukov
G. E. Cirlin
F. I. Zubov
Zh. I. Alferov
机构：
[1] Russian Academy of Sciences,Institute of Ultrahigh Frequency Semiconductor Electronics
[2] Russian Academy of Sciences,Saint Petersburg Academic University—Nanotechnology Research and Education Center
[3] Russian Academy of Sciences,Saint Petersburg Science Center
来源：
Semiconductors | 2016年 / 50卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The Postgrowth processing of GaAs/AlGaAs multilayer heterostructures for terahertz quantumcascade lasers (QCLs) are studied. This procedure includes the thermocompression bonding of In–Au multilayer heterostructures with a doped n+-GaAs substrate, mechanical grinding, and selective wet etching of the substrate, and dry etching of QCL ridge mesastripes through a Ti/Au metallization mask 50 and 100 μm wide. Reactive-ion-etching modes with an inductively coupled plasma source in a BCl3/Ar gas mixture are selected to obtain vertical walls of the QCL ridge mesastripes with minimum Ti/Au mask sputtering.
引用
收藏
页码：1377 / 1382
页数：5
相关论文
共 50 条
  • [1] Fabrication of a terahertz quantum-cascade laser with a double metal waveguide based on multilayer GaAs/AlGaAs heterostructures
    Khabibullin, R. A.
    Shchavruk, N. V.
    Pavlov, A. Yu.
    Ponomarev, D. S.
    Tomosh, K. N.
    Galiev, R. R.
    Maltsev, P. P.
    Zhukov, A. E.
    Cirlin, G. E.
    Zubov, F. I.
    Alferov, Zh. I.
    [J]. SEMICONDUCTORS, 2016, 50 (10) : 1377 - 1382
  • [2] AlGaAs/GaAs Terahertz Quantum Cascade Laser with Gold-Based Metal - Metal Waveguide
    Szerling, Anna
    Kosiel, Kamil
    Prokaryn, Piotr
    Szymanski, Michal
    Trajnerowicz, Artur
    Sakowicz, Maciej
    Karbownik, Piotr
    Pluska, Mariusz
    Walczakowski, Michal
    Palka, Norbert
    [J]. THZ FOR CBRN AND EXPLOSIVES DETECTION AND DIAGNOSIS, 2017, : 145 - 149
  • [3] Processing of AlGaAs/GaAs quantum-cascade structures for terahertz laser
    Szerling, Anna
    Kosiel, Kamil
    Szymanski, Michal
    Wasilewski, Zbig
    Golaszewska, Krystyna
    Laszcz, Adam
    Pluska, Mariusz
    Trajnerowicz, Artur
    Sakowicz, Maciej
    Walczakowski, Michal
    Palka, Norbert
    Jakiela, Rafal
    Piotrowska, Anna
    [J]. JOURNAL OF NANOPHOTONICS, 2015, 9
  • [4] Fabrication and Characterization of Terahertz Emitting GaAs/AlGaAs Micropillar Quantum Cascade Structures in a Double Metal Waveguide
    Krall, M.
    Brandstetter, M.
    Deutsch, C.
    Detz, H.
    Zederbauer, T.
    Andrews, A. M.
    Schrenk, W.
    Strasser, G.
    Unterrainer, K.
    [J]. 2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE AND INTERNATIONAL QUANTUM ELECTRONICS CONFERENCE (CLEO EUROPE/IQEC), 2013,
  • [5] Terahertz radiation generation in multilayer quantum-cascade heterostructures
    Ikonnikov, A. V.
    Marem'yanin, K. V.
    Morozov, S. V.
    Gavrilenko, V. I.
    Pavlov, A. Yu.
    Shchavruk, N. V.
    Khabibullin, R. A.
    Reznik, R. R.
    Cirlin, G. E.
    Zubov, F. I.
    Zhukov, A. E.
    Alferov, Zh. I.
    [J]. TECHNICAL PHYSICS LETTERS, 2017, 43 (04) : 362 - 365
  • [6] Terahertz radiation generation in multilayer quantum-cascade heterostructures
    A. V. Ikonnikov
    K. V. Marem’yanin
    S. V. Morozov
    V. I. Gavrilenko
    A. Yu. Pavlov
    N. V. Shchavruk
    R. A. Khabibullin
    R. R. Reznik
    G. E. Cirlin
    F. I. Zubov
    A. E. Zhukov
    Zh. I. Alferov
    [J]. Technical Physics Letters, 2017, 43 : 362 - 365
  • [7] Minimum number of stages in a GaAs/AlGaAs terahertz quantum cascade laser with a metal-to-metal waveguide
    Dubinov, Alexander a.
    [J]. JOURNAL OF OPTICAL TECHNOLOGY, 2024, 91 (01) : 19 - 22
  • [8] Fabrication and characteristics of GaN/AlGaN multilayer structure for terahertz quantum-cascade laser
    Wang, S. C.
    Soref, Richard
    Sun, Greg
    [J]. TERAHERTZ PHYSICS, DEVICES, AND SYSTEMS, 2006, 6373
  • [9] Waveguide integrated terahertz quantum-cascade laser systems
    Nuttall, E.
    Han, Y. J.
    Pardo, D.
    Horbury, M. D.
    Kondawar, S. S.
    North, N. K.
    Kundu, I
    Auriacombe, O.
    Rawlings, T.
    Brewster, N.
    Oldfield, M.
    Salih, M.
    Li, L. H.
    Zafar, E.
    Davies, A. G.
    Linfield, E. H.
    Saenz, E.
    Wang, H.
    Ellison, B. N.
    Valavanis, A.
    [J]. 2021 46TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES (IRMMW-THZ), 2021,
  • [10] Terahertz injection electroluminescence in multiperiod quantum-cascade AlGaAs/GaAs structures
    N. N. Zinov’ev
    A. V. Andrianov
    V. Yu. Nekrasov
    V. A. Petrovskii
    L. V. Belyakov
    O. M. Sreseli
    G. Hill
    J. M. Chamberlain
    [J]. Journal of Experimental and Theoretical Physics Letters, 2001, 74 : 100 - 102
12345