AlGaAs/GaAs Terahertz Quantum Cascade Laser with Gold-Based Metal - Metal Waveguide

被引：1

作者：

Szerling, Anna ^{[1
]}

Kosiel, Kamil ^{[1
]}

Prokaryn, Piotr ^{[1
]}

Szymanski, Michal ^{[2
]}

Trajnerowicz, Artur ^{[1
]}

Sakowicz, Maciej ^{[1
]}

Karbownik, Piotr ^{[1
]}

Pluska, Mariusz ^{[1
]}

Walczakowski, Michal ^{[3
]}

Palka, Norbert ^{[3
]}

机构：

[1] Inst Electr Mat Technol, Al Lotnikow 32-46, PL-02668 Warsaw, Poland

[2] Warsaw Univ Life Sci, Fac Appl Informat & Math, Nowoursynowska 159, PL-02776 Warsaw, Poland

[3] Mil Univ Technol, Kaliskiego 2, PL-00908 Warsaw, Poland

来源：

THZ FOR CBRN AND EXPLOSIVES DETECTION AND DIAGNOSIS | 2017年

关键词：

Terahertz quantum cascade laser; AlGaAs/GaAs structures; Metal - metal waveguides; Gold-gold mounting; Processing;

D O I：

10.1007/978-94-024-1093-8_17

中图分类号：

Q6 [生物物理学];

学科分类号：

071011 ;

摘要：

In this chapter, we report the fabrication of Al0.15Ga0.85As/GaAs similar to 3 THz frequency quantum cascade laser (QCL). Its operation is based on 3-quantum-well (3QW) modules, where the GaAs QWs are separated by Al0.15Ga0.85As barriers. The laser's active region is build by stacking the 228 modules. The lasers were fabricated as gold-gold waveguide devices and were gold-gold mounted on GaAs receptor wafers. The 300 nm Au/5 nm Ti claddings were made by sputtering, for which we used 8 x 10(-3) mbar pressure level and 50 W generator power. The wafer-bonding process was performed in the temperature range 350-400 degrees C. The structures were wet etched into ridges with widths in the range 50-160 microns and lengths 1.8 mm. The lasers operated with threshold current densities similar to 650 A/cm(2) at 77 K, when fed by 100-300 ns current pulses supplied with 300-1000 Hz repetition frequencies.

引用

页码：145 / 149

页数：5

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