Laser-induced nanopatterning of silicon with colloidal monolayers

被引：0
|
作者：
D. Brodoceanu
L. Landström
D. Bäuerle
机构：
[1] Johannes-Kepler-Universität Linz,Institut für Angewandte Physik
[2] University of California,Russell S. Springer Chair
来源：
Applied Physics A | 2007年 / 86卷
关键词：
Regular Lattice; Hole Formation; Optical Penetration Depth; Bang Laboratory; Colloidal Monolayer;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A regular lattice of amorphous silica microspheres is used as a microlens system for laser-induced single-step fabrication of arrays of nanoholes on a (100) Si surface. With single-pulse 265.7-nm femtosecond-laser radiation, hole diameters of 57±6.5 nm at full width at half maximum and depths of 6±1 nm have been achieved.
引用
下载
收藏
页码：313 / 314
页数：1
相关论文
共 50 条
  • [31] Laser-induced Marangoni convection in the presence of surfactant monolayers
    Gugliotti, M
    Baptista, MS
    Politi, MJ
    LANGMUIR, 2002, 18 (25) : 9792 - 9798
  • [32] Laser-induced Two- dimensional Surface Nanopatterning on Film Materials(Invited)
    Huang Jiaxu
    Li Jun
    Qiu Pei
    Xu Shaolin
    ACTA PHOTONICA SINICA, 2023, 52 (07)
  • [33] Laser-induced assembly of gold nanoparticles into colloidal crystals
    Harris, N.
    Ford, M. J.
    Cortie, M. B.
    McDonagh, A. M.
    NANOTECHNOLOGY, 2007, 18 (36)
  • [34] Laser assisted field induced oxide nanopatterning of hydrogen passivated silicon surfaces
    Pingree, L. S. C.
    Schmitz, M. J.
    Kramer, D. E.
    Hersam, M. C.
    APPLIED PHYSICS LETTERS, 2007, 91 (07)
  • [35] Laser-induced phase separation of silicon carbide
    Choi, Insung
    Jeong, Hu Young
    Shin, Hyeyoung
    Kang, Gyeongwon
    Byun, Myunghwan
    Kim, Hyungjun
    Chitu, Adrian M.
    Im, James S.
    Ruoff, Rodney S.
    Choi, Sung-Yool
    Lee, Keon Jae
    NATURE COMMUNICATIONS, 2016, 7
  • [36] LASER-INDUCED VAPOR-DEPOSITION OF SILICON
    HANABUSA, M
    NAMIKI, A
    YOSHIHARA, K
    APPLIED PHYSICS LETTERS, 1979, 35 (08) : 626 - 627
  • [37] Dynamics of laser-induced tunable focusing in silicon
    Nadav Shabairou
    Maor Tiferet
    Zeev Zalevsky
    Moshe Sinvani
    Scientific Reports, 12
  • [38] Laser-induced implantation and diffusion of magnesium into silicon
    Arutyunyan, VM
    Akhoyan, AP
    Adamyan, ZN
    Barsegyan, RS
    TECHNICAL PHYSICS, 2001, 46 (02) : 198 - 201
  • [39] Femtosecond laser-induced formation of spikes on silicon
    Her, TH
    Finlay, RJ
    Wu, C
    Mazur, E
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2000, 70 (04): : 383 - 385
  • [40] LASER-INDUCED ATOMIC CHLORINE ETCHING OF SILICON
    TREYZ, GV
    SCARMOZZINO, R
    BURKE, HH
    OSGOOD, RM
    LASER- AND PARTICLE-BEAM CHEMICAL PROCESSES ON SURFACES, 1989, 129 : 291 - 297
12345