Laser-induced nanopatterning of silicon with colloidal monolayers

被引：0
|
作者：
D. Brodoceanu
L. Landström
D. Bäuerle
机构：
[1] Johannes-Kepler-Universität Linz,Institut für Angewandte Physik
[2] University of California,Russell S. Springer Chair
来源：
Applied Physics A | 2007年 / 86卷
关键词：
Regular Lattice; Hole Formation; Optical Penetration Depth; Bang Laboratory; Colloidal Monolayer;
D O I：
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学科分类号：
摘要：
A regular lattice of amorphous silica microspheres is used as a microlens system for laser-induced single-step fabrication of arrays of nanoholes on a (100) Si surface. With single-pulse 265.7-nm femtosecond-laser radiation, hole diameters of 57±6.5 nm at full width at half maximum and depths of 6±1 nm have been achieved.
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页码：313 / 314
页数：1
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