Formation of nanoparticles on the silicon surface under the effect of femtosecond laser pulses

被引：0
|
作者：
S. V. Zabotnov
A. A. Ezhov
L. A. Golovan’
M. A. Lastovkina
V. I. Panov
V. Yu. Timoshenko
P. K. Kashkarov
机构：
[1] Moscow State University,Physics Department
来源：
Semiconductors | 2007年 / 41卷
关键词：
61.46.Df; 61.80.Ba; 68.37.Ps; 81.07.Bc; 81.16.Mk;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Nanoparticles were formed on the surface of single-crystal silicon as a result of irradiation of this surface with femtosecond laser pulses. According to the data of the atomic-force microscopy, the height of these nanoparticles ranges from 2 to 30 nm and their transverse size varies from 70 to 200 nm.
引用
收藏
页码：998 / 1001
页数：3
相关论文
共 50 条
  • [41] On the formation of regular sub-wavelength ripples by femtosecond laser pulses on silicon
    Qi, Litao
    Li, Fangzhou
    Lin, Haipeng
    Hu, Jinping
    OPTIK, 2015, 126 (24): : 4905 - 4909
  • [42] On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses
    Bonse, Joern
    Rosenfeld, Arkadi
    Krueger, Joerg
    JOURNAL OF APPLIED PHYSICS, 2009, 106 (10)
  • [43] Bonding of PMMA to silicon by femtosecond laser pulses
    Capodacqua, Filippo Maria Conte
    Volpe, Annalisa
    Gaudiuso, Caterina
    Ancona, Antonio
    SCIENTIFIC REPORTS, 2023, 13 (01)
  • [44] Bonding of PMMA to silicon by femtosecond laser pulses
    Filippo Maria Conte Capodacqua
    Annalisa Volpe
    Caterina Gaudiuso
    Antonio Ancona
    Scientific Reports, 13
  • [45] Femtosecond Laser Double Pulses Nanofabrication on Silicon
    Zhang, Jin
    Wang, Sumei
    Wang, Mengmeng
    Chu, Zhuyuan
    2019 INTERNATIONAL CONFERENCE ON INTELLIGENT MANUFACTURING AND INTELLIGENT MATERIALS (2IM 2019), 2019, 565
  • [46] Ablation of silicon with bursts of femtosecond laser pulses
    Gaudiuso, Caterina
    Kaemmer, Helena
    Dreisow, Felix
    Ancona, Antonio
    Tuennermann, Andreas
    Nolte, Stefan
    FRONTIERS IN ULTRAFAST OPTICS: BIOMEDICAL, SCIENTIFIC, AND INDUSTRIAL APPLICATIONS XVI, 2016, 9740
  • [47] Third harmonic generation from a silicon surface structured by femtosecond laser pulses
    Zabotnov, SV
    Ostapenko, IA
    Golovan, LA
    Timoshenko, VY
    Kashkarov, PK
    Shandybina, GD
    QUANTUM ELECTRONICS, 2005, 35 (10) : 943 - 946
  • [48] Nanograting Fabrication on the Surface of Silicon and Gallium Arsenide Using Femtosecond Laser Pulses
    Kim, Dae-jin
    Kim, Tae-hong
    Jang, Woo-young
    Lim, Ki-Soo
    Lee, Myeongkyu
    Sohn, Ik-Bu
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2011, 50 (06)
  • [49] Colorizing silicon surface with regular nanohole arrays induced by femtosecond laser pulses
    Zhang, Cheng-Yun
    Yao, Jian-Wu
    Liu, Hai-Ying
    Dai, Qiao-Feng
    Wu, Li-Jun
    Lan, Sheng
    Trofimov, Vyacheslav A.
    Lysak, Tatiana M.
    OPTICS LETTERS, 2012, 37 (06) : 1106 - 1108
  • [50] Formation of periodic ripples on silicon surface ablated by femtosecond laser
    Li Zhi-Ming
    Wang Xi
    Nie Jin-Song
    ACTA PHYSICA SINICA, 2017, 66 (10)
12345