Formation of nanoparticles on the silicon surface under the effect of femtosecond laser pulses

被引：0
|
作者：
S. V. Zabotnov
A. A. Ezhov
L. A. Golovan’
M. A. Lastovkina
V. I. Panov
V. Yu. Timoshenko
P. K. Kashkarov
机构：
[1] Moscow State University,Physics Department
来源：
Semiconductors | 2007年 / 41卷
关键词：
61.46.Df; 61.80.Ba; 68.37.Ps; 81.07.Bc; 81.16.Mk;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Nanoparticles were formed on the surface of single-crystal silicon as a result of irradiation of this surface with femtosecond laser pulses. According to the data of the atomic-force microscopy, the height of these nanoparticles ranges from 2 to 30 nm and their transverse size varies from 70 to 200 nm.
引用
收藏
页码：998 / 1001
页数：3
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